Titanium Parts Rau Semiconductor

1. Ultra-tsawg impurity tso tawm tswj

Peb txais yuav cov txheej txheem ua cov cuab yeej ceramic + hlau - cov cuab yeej pub dawb thoob plaws hauv cov txheej txheem tsim khoom. Tag nrho cov khoom pab cuam nyob rau hauv kev sib cuag nrog lub workpiece undergo peb rounds ntawm acid ntxuav purification, nruj me ntsis tswj tag nrho cov ntsiab lus ntawm hlau, chromium, thiab lwm yam. kom nyob rau hauv 0.02%. Qhov no kiag li zam qhov teeb meem sib kis ntawm cov hlau ion nyob rau hauv cov txheej txheem semiconductor thiab tiv thaiv kev tsim cov hlau seem ntau dhau ntawm lub wafer nto. Nws txo qhov kev pheej hmoo ntawm Circuit Court luv ntawm cov khoom siv sab.

 

2. Ntev -lub sij hawm corrosion kuj

Tom qab ib feem yog tsim, nws yuav undergo ob qhov sib txawv ntawm cov tsis muaj zog oxidizing tov immersion rau passivation. Ib qho 8-10nm tuab titanium dioxide tiv thaiv zaj duab xis yuav raug tsim tawm ntawm qhov chaw. Txawm tias thaum raug diluted hydrofluoric acid thiab nitric acid tov tov nyob rau hauv lub semiconductor tu txheej txheem rau 2000 teev tsis tu ncua, yuav tsis muaj pitting detachment thiab tsis muaj khib nyiab khawb lub wafer nto.

 

3. High -precision dimensional stability

Thaum lub sij hawm ua, tag nrho cov txheej txheem siv cov kua nitrogen txau rau qhov kub thiab txias, tswj cov deformation generated thaum ua nyob rau hauv 0.003mm. Ua ntej tawm hauv lub Hoobkas, cov khoom tiav tau raug kuaj xyuas 24-teev siab thiab qis kub. Txawm tias thaum ua haujlwm hauv cov txheej txheem semiconductor ib puag ncig ntawm 180℃ntev, yuav tsis muaj deformation jamming thiab tsis muaj deformation sticking. Tsis tas yuav tsum nquag disassemble thiab kho qhov kev sib tw kom raug.

 

4. Tsawg qis tus nqi tsim nyog rau lub tshuab nqus tsev

Txhua qhov chaw yog thawj zaug rau 120℃lub tshuab nqus tsev ci rau 48 teev rau kev kho degassing. Cov dej vapor thiab cov khoom me me adsorbed ntawm qhov chaw raug tshem tawm tag nrho. Tom qab muab tso rau hauv lub tshuab nqus tsev semiconductor, nws tuaj yeem pab cov khoom siv kom ncav cuag lub hom phiaj nqus tsev kawm ntawv 25% sai dua li siv cov khoom siv hlau tsis zoo tib yam, txo lub sijhawm poob ntawm kev tos lub tshuab nqus tsev.

1. Wafer tais rau PVD vapor deposition tshuab

Siv los txhawb cov silicon wafer kom coated. Nyob rau hauv qhov siab - qhov kub thiab txias ntawm lub hom phiaj cov khoom sputtering, titanium ib feem yuav tsis hnov ​​​​mob nrog cov roj sputtering thiab yuav tsis tso cov impurities ntau dhau rau hauv lub chamber, uas tuaj yeem txhim kho qhov sib xws ntawm cov hlau zaj duab xis txheej tso rau ntawm qhov chaw wafer los ntawm 5%, zam qhov teeb meem ntawm nti tawm los ntawm cov hlau tsis txaus. Nws yog tsim rau txheej txheej ntau lawm ntawm 28nm thiab hauv qab txheej txheem.

 

2. Wafer carrier khib rau ntub tu tshuab

Nyob rau hauv RCA tus qauv tu txheej txheem, cov khib nyiab yog tag nrho rau hauv cov kua qaub thiab muaj zog alkali ntxuav kev daws teeb meem. Cov khoom siv titanium yuav tsis raug corroded thiab tsim cov khib nyiab, thiab yuav tsis ua raws li qhov chaw wafer kom ua rau muaj kab mob. Nws tuaj yeem txo qhov tsis xws luag ntawm ib pawg wafer tu los ntawm 12%. Nyob rau tib lub sijhawm, lub teeb yuag yam ntxwv ntawm lub khib kuj tuaj yeem txo qhov kev sib kis ntawm lub tshuab ntxuav thiab txo cov khoom siv hluav taws xob.

 

3. Electrode kho lub rooj rau ion implantation tshuab

Siv los kho qhov siab -voltage electrodes hauv lub tshuab. Cov khoom tsis sib nqus ntawm titanium yuav tsis cuam tshuam rau txoj hauv kev ntawm ion beam, tso cai rau qhov sib txawv ntawm qhov sib txawv ntawm ion implantation tswj nyob rau hauv ib qho me me, zam qhov teeb meem ntawm kev txhaj tshuaj tsis sib xws hauv cheeb tsam ntawm wafer. Nws ho txhim kho cov hluav taws xob kev ua tau zoo sib xws ntawm cov nti.

 

4. Connector flange rau semiconductor nqus raj

Txuas qhov sib txawv ntawm lub tshuab nqus tsev raj ntawm lub tshuab. Qhov qis qis qis ntawm titanium tuaj yeem tswj tau qhov siab - ib puag ncig huv huv hauv cov raj xa dej thiab yuav tsis ua rau muaj kev hloov pauv hauv lub tshuab nqus tsev vim cov roj tso tawm ntawm cov hlau tsis zoo ib yam flanges tom qab siv sijhawm ntev -. Nws txo cov xov tooj ntawm lub tshuab kaw lub tswb tshwm sim los ntawm lub tshuab nqus tsev tsis zoo thiab ua rau lub sijhawm ua haujlwm tas li ntawm cov kab ntau lawm los ntawm 30%.

1. Customization ntawm tsis yog - tus qauv qhov ntev

Kev cia siab ntawm peb tus kheej 5-axis machining chaw, qhov ntev, dav thiab qhov siab ntawm cov khoom tuaj yeem hloov kho raws li qhov chaw teeb tsa ntawm tus neeg siv khoom cov khoom siv semiconductor uas twb muaj lawm. Tsis muaj qhov xav tau rau cov neeg siv khoom los hloov kho cov khoom siv interface, thiab thawj cov qauv tuaj yeem xa tuaj tsis pub dhau 7 hnub.

 

2. Customization ntawm deg mob

Ob txoj kev kho saum npoo tuaj yeem xaiv tau raws li qhov xav tau: daim iav polishing thiab matte sandblasting. Lawv tsim nyog rau kev ua kom huv huv sib txawv ntawm cov txheej txheem tsim khoom thiab tuaj yeem zam qhov adhesion uas cuam tshuam rau qhov chaw tsim khoom semiconductor.

 

3. Customization ntawm tshwj xeeb interfaces

Cov qauv tshwj xeeb xws li daim npav tshwj xeeb thiab qhov chaw qhov chaw tuaj yeem raug kho kom haum raws li cov kev cai sib dhos ntawm tus neeg siv khoom tus kheej - cov khoom tsim. Tsis muaj cov khoom siv adapter ntxiv yuav tsum tau ntxiv.

Yam khoom	Specification
Khoom npe	Titanium Parts rau Semiconductor
Khoom siv	Ntshiab Titanium (Qib 2), Titanium Alloy (Qib 5 Ti-6Al-4V)
Kev tsim khoom	CNC Machining, Tig, Milling, Sib Tsoo, Vuam
Muaj Cov Duab	Phaj, Ntiv nplhaib, Tube, Qws, Thaiv, Custom Parts
Qhov ntev	Customized raws li cov duab kos lossis cov qauv
Ua siab ntev	± 0.01 hli
Nto tiav	Polished, Sandblasted, Pickled, Anodized, Precision Machined
Nto Roughness	Ra 0.2-1.6 μm (Kev Cai Muaj)
Purity	Txog li 99.6% (Qib 2 Titanium)
Ua haujlwm kub	Txog li 400 degree
Qhov ntom	4.51 g / cm³
Hardness	Qib 2: HB 145–200; Qib 5: HRC 30–36
Corrosion Resistance	Kev tiv thaiv zoo heev rau cov kua qaub, alkalis, thiab cov txheej txheem tshuaj
Tshuaj Compatibility	Haum rau cov tshuaj semiconductor thiab ultra-ib puag ncig purity siab
Kev tshuaj xyuas	Dimensional Inspection, Material Certification, Surface Inspection

 

 

 

Cim npe nrov: Tuam Tshoj titanium qhov chaw rau semiconductor, Tuam Tshoj titanium qhov chaw rau semiconductor manufacturers, lwm tus neeg, Hoobkas